期刊
MRS COMMUNICATIONS
卷 1, 期 1, 页码 13-16出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1557/mrc.2011.7
关键词
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资金
- NSF [CMMI 07-28189]
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1102201] Funding Source: National Science Foundation
A novel method for the in situ thermomechanical test of micro/nanoscale samples at high temperature is presented. During the in situ test, the stage is resistively heated while the temperature is measured by a cofabricated temperature sensor. For experimental demonstration of the thermomechanical testing method, we fabricate the Micro-Electro-Mechanical Systems (MEMS) stage using silicon carbide (SiC) and carry out in situ uniaxial tests for single-crystal silicon (SCS) microsamples at temperatures from room temperature to 400 degrees C. We recover the known elastic modulus of SCS within 1% error in this temperature range.
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