期刊
INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES
卷 1, 期 1, 页码 19-27出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1759078709000038
关键词
Aluminum nitride; Ferroelectrics; Bulk acoustic waves; Thin films
资金
- Swiss Office for Education and Research in the frame of several European projects
- Swiss Commission of Innovation and Technology
- Swiss National Science Foundation [200021-112204]
Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, materials and properties for thin-film bulk acoustic wave resonators are discussed on some selected issues: the piezoelectric coefficients and acoustic losses of AlN, the relation of the first one with microstructural parameters, the inclusion of parasitic elements, and the merits of and problems with ferroelectric materials.
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