期刊
AIP ADVANCES
卷 4, 期 12, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4902018
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资金
- National Council of Taiwan [NSC 102-2221-E-002-046]
This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the micro-electromechanical system (MEMS) fabrication technology and the resonant performance was evaluated. (C) 2014 Author(s).
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