4.7 Article

Demonstration of nanoimprinted hyperlens array for high-throughput sub-diffraction imaging

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SCIENTIFIC REPORTS
卷 7, 期 -, 页码 -

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NATURE PUBLISHING GROUP
DOI: 10.1038/srep46314

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资金

  1. National Research Foundation of Korea (NRF) grants of Young Investigator program [NRF-2015R1C1A1A02036464]
  2. Engineering Research Center program [NRF-2015R1A5A1037668]
  3. Global Frontier program [CAMM-2014M3A6B3063708]
  4. Pioneer Research program [NRF-2015M3C1A3022550]
  5. Commercialization Promotion Agency for R&D Outcomes (COMPA) grant [2016K000129]
  6. Ministry of Science, ICT and Future Planning (MSIP) of Korean government

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Overcoming the resolution limit of conventional optics is regarded as the most important issue in optical imaging science and technology. Although hyperlenses, super-resolution imaging devices based on highly anisotropic dispersion relations that allow the access of high-wavevector components, have recently achieved far-field sub-diffraction imaging in real-time, the previously demonstrated devices have suffered from the extreme difficulties of both the fabrication process and the non-artificial objects placement. This results in restrictions on the practical applications of the hyperlens devices. While implementing large-scale hyperlens arrays in conventional microscopy is desirable to solve such issues, it has not been feasible to fabricate such large-scale hyperlens array with the previously used nanofabrication methods. Here, we suggest a scalable and reliable fabrication process of a large-scale hyperlens device based on direct pattern transfer techniques. We fabricate a 5 cm x 5 cm size hyperlenses array and experimentally demonstrate that it can resolve sub-diffraction features down to 160 nm under 410 nm wavelength visible light. The array-based hyperlens device will provide a simple solution for much more practical far-field and real-time super-resolution imaging which can be widely used in optics, biology, medical science, nanotechnology and other closely related interdisciplinary fields.

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