期刊
OPTICAL MATERIALS EXPRESS
卷 2, 期 11, 页码 1462-1469出版社
OPTICAL SOC AMER
DOI: 10.1364/OME.2.001462
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资金
- Si-based Laser Initiative of the Multidisciplinary University Research Initiative (MURI)
- Air Force Office of Scientific Research (AFOSR)
- Naval Air Warfare Center Aircraft Division (NAWC-AD) under OTA [N00421-03-9-0002]
- NSF fellowship program [1122374]
We demonstrate CVD in situ doping of Ge by utilizing phosphorus delta-doping for the creation of a high dopant diffusion source. Multiple monolayer delta doping creates source phosphorous concentrations above 1 x 10(20)cm(-3), and uniform activated dopant concentrations above 4 x 10(19)cm(-3) in a 600-800nm thick Ge layer after in-diffusion. By controlling dopant out-diffusion, near-complete incorporation of phosphorus diffusion source is shown. (c) 2012 Optical Society of America
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