期刊
OPTICAL MATERIALS EXPRESS
卷 1, 期 3, 页码 451-457出版社
OPTICAL SOC AMER
DOI: 10.1364/OME.1.000451
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资金
- GIST
- WCU of MEST [R31-2008-000-10026-0]
- National Research Foundation of Korea (NRF)
- Korea government (MEST) [2011-0017606]
We demonstrate a highly tolerant and highly reflective broadband a-Si distributed Bragg reflector fabricated by oblique angle deposition. By tuning the refractive index of an a-Si film, a high index contrast material system was achieved. The highly tolerant and broadband reflective characteristics of the a-Si distributed Bragg reflector were investigated by calculation and fabrication. A broad stop band (Delta lambda/lambda = 33.7%, R>99%) with only a five-pair a-Si distributed Bragg reflector was achieved experimentally. The size-, feature- and substrate-independent method for highly reflective Bragg reflectors was realized by simple oblique angle evaporation. (C) 2011 Optical Society of America
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