期刊
NANOSCIENCE AND NANOTECHNOLOGY LETTERS
卷 3, 期 2, 页码 230-234出版社
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/nnl.2011.1160
关键词
MEMS; Flow Sensor; Silicon Nanowire
资金
- A-STAR [09214 80069]
- University Research Committee [R-263-000-475-112]
- National University of Singapore [MOE2009-T2-2-011]
Cantilever structures were reported to be used for flow sensing purposes. Herein, we present silicon nanowire (SiNW) based cantilever flow sensor. Five cantilever flow sensors with different depths are modeled and simulated (fluid-structure) with water flow velocity from 50 cm/s to 200 cm/s. SiNW is embedded in the cantilever as piezoresistive transducer at the anchor, and a maximum resistance change of 11.2% is obtained. Based on the results, increasing depth will not only contributes to larger cantilever deformation at fixed flow velocity, but also improves its sensitivity. However when the depth become larger to certain degree, this effect tends to saturate.
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