期刊
MATERIALS
卷 6, 期 11, 页码 5094-5117出版社
MDPI
DOI: 10.3390/ma6115094
关键词
monolithic integration; magneto-optics; magnetic oxides; thin films; optical isolator; optical resonator
类别
资金
- National Science Foundation (Electronic, Photonic, and Magnetic Devices Program) [1231392]
- National Science Foundation (Division of Materials Research) [DMR 0604430]
- CMSE [NSF DMR0819762]
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1231348] Funding Source: National Science Foundation
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [1104912] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1231392] Funding Source: National Science Foundation
- Office Of The Director
- EPSCoR [0814251] Funding Source: National Science Foundation
Achieving monolithic integration of nonreciprocal photonic devices on semiconductor substrates has been long sought by the photonics research society. One way to achieve this goal is to deposit high quality magneto-optical oxide thin films on a semiconductor substrate. In this paper, we review our recent research activity on magneto-optical oxide thin films toward the goal of monolithic integration of nonreciprocal photonic devices on silicon. We demonstrate high Faraday rotation at telecommunication wavelengths in several novel magnetooptical oxide thin films including Co substituted CeO2-delta, Co- or Fe-substituted SrTiO3-delta, as well as polycrystalline garnets on silicon. Figures of merit of 3 similar to 4 deg/dB and 21 deg/dB are achieved in epitaxial Sr(Ti0.2Ga0.4Fe0.4)O3-delta and polycrystalline (CeY2)Fe5O12 films, respectively. We also demonstrate an optical isolator on silicon, based on a racetrack resonator using polycrystalline (CeY2)Fe5O12/silicon strip-loaded waveguides. Our work demonstrates that physical vapor deposited magneto-optical oxide thin films on silicon can achieve high Faraday rotation, low optical loss and high magneto-optical figure of merit, therefore enabling novel high-performance non-reciprocal photonic devices monolithically integrated on semiconductor substrates.
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