Emission and absorption of optical phonons in Multigate Silicon Nanowire MOSFETs

In this paper we study the influence of emission/absorption processes due to optical phonons on the electrical properties of multigate silicon nanowire transistors. We show that low-energy phonons reduce drain current through backscattering of carriers by emission/absorption processes while high-energy phonons redistribute the current energy spectrum along the nanowire channel through phonon emission without significantly reducing the drain current drive. The influence of emission/absorption is investigated in different multigate silicon FET structures with uniform channel, single impurity, random doping atom distribution and oxide tunnel barriers. A three-dimensional quantum mechanical device simulator based on the NEGF formalism in coupled mode-space approach is used to model electron transport in the presence of optical phonon scattering mechanism. Electron-phonon scattering is accounted for by adopting the self-consistent Born approximation and using the deformation potential theory.