期刊
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY
卷 3, 期 8, 页码 1384-1389出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TCPMT.2013.2240040
关键词
Bandpass filter; flexible; PerMX; polymer; wideband
This paper presents a wideband 60 GHz bandpass filter fabricated on a flexible PerMX polymer substrate. A conventional parallel-coupled half-wavelength resonator filter is selected as an embedded passive device. A narrow gap of 5 mu m between 750-mu m-long resonators is successfully fabricated thanks to a Si support substrate. Surface modification is used to release the flexible polymer substrate from the Si substrate after the filter fabrication. A wideband filter is achieved through the optimization of the narrow gaps between the adjacent resonators. The designed filters are implemented in two different types, without a cover and with a cover. The filter without a cover shows an insertion loss of 4 dB at the center frequency of 63.5 GHz and a return loss of better than 10 dB including two CPW pads, while the filter with a cover has an insertion loss of 3.8 dB at 59 GHz and a return loss of better than 13 dB. In addition, the uncovered filter has a 3-dB bandwidth of 24% at 63.5 GHz, while the covered filter shows 28% at 59 GHz.
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