期刊
MICROMACHINES
卷 6, 期 12, 页码 1876-1889出版社
MDPI
DOI: 10.3390/mi6121460
关键词
microelectromechanical systems (MEMS) mirror; electrothermal actuation; Cu/W bimorph; lateral-shift-free (LSF); vertical scan; multimorph frame; large range; fast response; backside release
类别
资金
- National Science Foundation [1512531, 1514154]
- University of Florida Opportunity Seed Fund
- Direct For Computer & Info Scie & Enginr
- Div Of Information & Intelligent Systems [1514154] Funding Source: National Science Foundation
- Div Of Chem, Bioeng, Env, & Transp Sys
- Directorate For Engineering [1512531] Funding Source: National Science Foundation
This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 m at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is +/- 18 degrees at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.
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