期刊
MICROMACHINES
卷 6, 期 8, 页码 1135-1142出版社
MDPI
DOI: 10.3390/mi6081135
关键词
multiple nanowires; glucose sensor; enzymatic modification; top-down method
类别
资金
- National Science Council of the Republic of China [NSC 102-2221-E-076-MY3]
This study fabricated a multiple poly-Si nanowires sensor through a top-down method and immobilized glucose oxidase on the multiple nanowires for determining glucose concentration. The proposed sensor is 340 nm in width and uses five physically identical and parallel nanowires. The sensor contained nanowires of various lengths (3, 5, and 10 mu m). Experimental results showed that sensor sensitivity is inversely proportional to nanowire length. The sensor with 3 mu m in nanowire length exhibited a theoretical resolution of 0.003 mg/dL and the highest sensitivity of 0.03 mu A/(mg/dL). Furthermore, the proposed sensor retains this performance when reused for up to 10 applications.
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