期刊
NATURE COMMUNICATIONS
卷 3, 期 -, 页码 -出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/ncomms1723
关键词
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资金
- Deutsche Forschungsgemeinschaft [Ko 416/18]
- German Excellence Initiative via the Nanosystems Initiative Munich (NIM)
- LMUexcellent
- German-Israeli Foundation
- European Commission under the FET [233992]
Following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS), nanomechanical resonators with increasingly high quality factors are possible. Consequently, efficient, non-dissipative transduction schemes are required to avoid the dominating influence of coupling losses. Here we present an integrated NEMS transducer based on a microwave cavity dielectrically coupled to an array of doubly clamped pre-stressed silicon nitride beam resonators. This cavity-enhanced detection scheme allows resolving of the resonators' Brownian motion at room temperature while preserving their high mechanical quality factor of 290,000 at 6.6 M MHz. Furthermore, our approach constitutes an 'opto'-mechanical system in which backaction effects of the microwave field are employed to alter the effective damping of the resonators. In particular, cavity-pumped self-oscillation yields a linewidth of only 5 Hz. Thereby, an adjustement-free, all-integrated and self-driven nanoelectromechanical resonator array interfaced by just two microwave connectors is realised, which is potentially useful for applications in sensing and signal processing.
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