期刊
JOURNAL OF OPTICS
卷 13, 期 8, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/2040-8978/13/8/085601
关键词
graphene; femtosecond laser; patterning; microdevice
类别
资金
- Natural Science Foundation of China [10974103]
- Program for New Century Excellent Talents in University [NCET-09-0484]
- Chinese National Key Basic Research Special Fund [2011CB922003]
- Natural Science Foundation of Tianjin [09JCYBJC04300]
- Chinese Ministry of Education [109039]
Micro- and nanostructures were fabricated directly on graphene nanosheets by controlling the conditions of femtosecond laser pulse etching. High quality graphene micro-and nanostructures with a minimum width of 492 nm were obtained as the graphene nanosheets used in our experiments were large-scale, uniform and highly conductive. Various complex patterns were successfully created through femtosecond laser etching. Furthermore, by managing the laser energy, the graphene under the Au electrodes could be completely or partly removed. This technology of direct patterning of micro- and nanostructures on graphene through femtosecond laser technology might pave the way for the integration of graphene-based electronic microdevices.
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