期刊
IEEE PHOTONICS JOURNAL
卷 1, 期 3, 页码 197-204出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOT.2009.2031596
关键词
Biosensor; ring resonator; silicon on insulator; slot waveguide
资金
- Ghent University [B/05958/01]
- Flemish Institute for the Promotion of Innovation through Science and Technology (IWT)
We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mu m x 10 mu m, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4: 2 . 10(-5) RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins.
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