Aerosol assisted chemical vapour deposition of transparent conductive ZnO thin films with hexagonal microplate surfaces and ultrahigh haze values

We report a novel and facile aerosol assisted chemical vapour deposition (AACVD) approach to fabricate transparent conductive ZnO thin films with highly hexagonal-plate-textured surfaces on silica glass substrates by using zinc-acetate-dihydrate, acetic-acid, deionized water and methanol as a precursor solution.