Development of a transportable μ-XRF spectrometer with polycapillary half lens

We developed a transportable micro-XRF (mu-XRF) spectrometer using a polycapillary X-ray focusing half lens, which was placed between the sample and the detector. The total weight of the developed spectrometer was about 2 kg; its dimensions were 18 (W) x 26 (D) x 40 (H) cm. The spatial resolution of the spectrometer with the half lens of a working (focal) distance of 30 mm was 171 mu m at Fe K alpha, which was evaluated by a wire scanning method. In this setup, it is easy to replace the polycapillary X-ray half lens with one having a different analytical performance, because a precise position-adjustment of the X-ray lens is not required. The spacial resolution with the half lens of a working distance of 16 mm was 106 mu m at Fe K alpha. Depending on analyzing area on the sample and required spatial resolution, we can easily change the X-ray lens, as in a conventional optical microscope. The calibration curves of V, Cr, Mn, and Ni measured for standard steel materials showed good linear relationships (correlation coefficients >0.993). Clear elemental mapping could be obtained by scanning the sample (Cu mesh). An elemental analysis of a micro-region in an electronic device was also performed by the transportable mu-XRF spectrometer. Sn and Pb were detected at the metallic part (Sn-Pb solder) of the device. Br and Ba were observed at some resin parts of the electronic device. Copyright (C) 2009 John Wiley & Sons, Ltd.