On the geometry control of magnetic devices: Impact of photo-resist profile, shadowing effect, and material properties

In this paper, we described how to control the magnetic junction critical dimension (CD) and profile defined by ion beam milling and its implication to device performance. The impact of standing waves on breaking the photo-resist and on the resultant junction defects have been highlighted. The ideal device profile and geometry are also discussed. (C) 2010 Elsevier Ltd. All rights reserved.