期刊
VACUUM
卷 84, 期 5, 页码 713-717出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2009.06.016
关键词
Nanotube; Cold cathode; Field emission; Vacuum ionization gauge
The applicability of carbon nanotubes to an electron source for a Bayard-Alpert type vacuum gauge has been investigated. Three gauge configurations are designed to optimize the gauge performance. The optimized gauge, in which an additional shield electrode is fixed on a gate electrode, exhibits good measurement of linearity between ion Current and system pressure from 10(-7) to 10(-2) Pa. A gauge sensitivity of 0.05 Pa-1 has been achieved under 100 mu A emission current for nitrogen, comparable with 0.07 Pa-1 of commercial ionization gauges. (C) 2009 Elsevier Ltd. All rights reserved.
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