期刊
VACUUM
卷 84, 期 5, 页码 602-606出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2009.10.008
关键词
InP; Ion beam sputtering; X-ray photoelectron spectroscopy
Size dependant core-level shifts have been investigated here for the InP nano-dots fabricated by the 3 keV ion irradiation. The self assembled nano dots exhibit core-level shifts and band gap expansion. The core-level shifts are however inhomogeneous, not exhibiting any systematic dependence on the size of the dots. The inhomogeneous core-level shifts as well as the band gap expansion are the result of cumulative effect of the nano-dimensional sizes and the stoichiometric variations in InP nano dots. The nucleation of the self assembled nano dots is promoted by the creation of In-rich zones after the preferential sputtering of R Decreased In/P concentration, at longer sputtering durations, leads to the fragmentation of dots. (C) 2009 Elsevier Ltd. All rights reserved.
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