期刊
ULTRAMICROSCOPY
卷 121, 期 -, 页码 31-37出版社
ELSEVIER
DOI: 10.1016/j.ultramic.2012.06.012
关键词
High-resolution transmission electron microscopy; Low acceleration voltage; Spherical aberration corrector; Information limit; Young fringe; Monochromator
类别
资金
- JST
- MEXT
We assess the imaging performance of a transmission electron microscopy (TEM) system operated at a relatively low acceleration voltage using the three-dimensional (3D) Fourier transform of through-focus images. Although a single diffractogram and the Thon diagram cannot distinguish between the linear and non-linear TEM imaging terms, the 3D Fourier transform allows us to evaluate linear imaging terms, resulting in a conclusive assessment of TEM performance. Using this method, information transfer up to 98 pm is demonstrated for an 80 kV TEM system equipped with a spherical aberration corrector and a monochromator. We also revisit the Young fringe method in the light of the 3D Fourier transform, and have found a considerable amount of non-linear terms in Young fringes at 80 kV even from a typical standard specimen, such as an amorphous Ge thin film. (C) 2012 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据