期刊
ULTRAMICROSCOPY
卷 111, 期 6, 页码 557-561出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2010.11.008
关键词
Atom probe; Ultraviolet femtosecond laser; Insulating substrate
类别
资金
- CREST, Japan Science and Technology Agency
- World Premier International (WPI) Research Center Initiative on Materials Nanoarchitronics, MEXT, Japan
We demonstrate that the atom probe analyses of metallic thin films on insulating substrates are possible using laser assisted field evaporation. The tips with metallic thin film and insulating substrate (0.6-3 mu m in thickness) were prepared by the lift-out and annular ion beam milling techniques on tungsten supports. In spite of the existence of thick insulating layer between the metallic film and the tungsten support, atom probe tomography with practical mass resolution, signal-to-noise ratio and spatial resolution was found to be possible using laser assisted field evaporation. (C) 2010 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据