期刊
ULTRAMICROSCOPY
卷 111, 期 8, 页码 969-972出版社
ELSEVIER
DOI: 10.1016/j.ultramic.2011.01.040
关键词
LMIS; FEEP; Field emission; Indium; Beam divergence; Charged particle optics; Propulsion; Plasma diagnostic
类别
The current-dependent beam divergence at a distance of 50 pm from an indium-liquid metal ion source is derived from experimental data obtained by measuring the beam spread with a 3D Plasma diagnostic system at a distance of 10 cm from the needle tip. The observed relationship between emission current and beam divergence in vicinity of the emitting needle is used to design a focusing electrode for a field-emission electric propulsion thruster operating at currents up to 150 mu A. Another application involves focused ion beam columns which may choose to forego a beam-limiting aperture, such as LMIS-based rapid machining tools with large beam currents. (C) 2011 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据