4.4 Article

Optimization of STEM tomography acquisition - A comparison of convergent beam and parallel beam STEM tomography

期刊

ULTRAMICROSCOPY
卷 110, 期 9, 页码 1231-1237

出版社

ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2010.05.008

关键词

STEM; Depth of field; Resolution; Electron tomography

资金

  1. German Research Foundation DFG [SFB 569, KA 1295-7/1]

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In this paper two imaging modes in a state-of-the-art scanning transmission electron microscope (STEM) are compared: conventional STEM with a convergent beam (referred to as nanoprobe) and STEM with a parallel beam (referred to as microprobe). The effect and influence of both modes with respect to their depth of field are investigated. Tomograms of a human white blood cell (hemophagocytes) are acquired, aligned, and evaluated. It is shown that STEM using a parallel beam produces tomograms with fewer distortions and artifacts that allows resolving finer features. Microprobe STEM tomography is advantageous especially in life science, when semi-thin sections (approximately 0.5 mu m thick) of biological samples are imaged at relatively low magnification with a large field of view. (C) 2010 Elsevier B.V. All rights reserved.

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