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Ultrafast laser processing of materials: a review

期刊

ADVANCES IN OPTICS AND PHOTONICS
卷 7, 期 4, 页码 684-712

出版社

OPTICAL SOC AMER
DOI: 10.1364/AOP.7.000684

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  1. National Science Foundation Graduate Research Fellowship [DGE 0644491, DGE 0946799]
  2. Department of Defense (DoD) through the National Defense Science and Engineering Graduate Fellowship (NDSEG) Program
  3. Kyocera Corporation

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We present an overview of the different processes that can result from focusing an ultrafast laser light in the femtosecond-nanosecond time regime on a host of materials, e.g., metals, semiconductors, and insulators. We summarize the physical processes and surface and bulk applications and highlight how femtosecond lasers can be used to process various materials. Throughout this paper, we will show the advantages and disadvantages of using ultrafast lasers compared with lasers that operate in other regimes and demonstrate their potential for the ultrafast processing of materials and structures. (C) 2015 Optical Society of America

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