All-Around SiN Stressor for High and Homogeneous Tensile Strain in Germanium Microdisk Cavities

ADVANCED OPTICAL MATERIALS

WILEY-V C H VERLAG GMBH

1. Triangle de la Physique under Gerlas convention
2. Agence Nationale de la Recherche under GRAAL convention [BS03 00401]
3. RENATECH network
4. CNano-Region Ile de France NANOETCH project
5. CIFRE grant