期刊
THIN SOLID FILMS
卷 666, 期 -, 页码 94-99出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2018.09.005
关键词
Indium-tungsten-oxide; Thin-film transistors; Multi-stacked active layer; High-k; Interfacial layer engineering
类别
资金
- Ministry of Science and Technology, Taiwan [MOST106-2221-E-009-107-MY3]
In order to effectively enhance the carrier mobility and device stability, simultaneously, a multi-stacked active layer of thin film transistor with a novel type of channel material, amorphous indium-tungsten-oxide, is proposed in this work. Atop-cappingoxygen-rich indium-tungsten-zinc-oxide thin film is used for suppressing the influence of the molecular adsorption or desorption from the ambient at the back channel in the gate bias stress test. In addition, a bottom-bufferingoxygen-rich indium-tungsten-zinc-oxide thin film is deposited to avoid the oxygen vacancy generation during the following thermal process. On the other hand, a 1-nm thick WO3 film is inserted between the high-k gate insulator and active layer, which play important roles as interfacial layer for improving the interface quality and keeping the stability of front channel film. Besides, an HfO2 dielectric film is chosen as gate insulator for realizing the low-voltage operation. As a result, the novel tungsten doped channel material with both-sideoxygen-rich active layer exhibits a high I-ON/I-OFF current ratio of similar to 6x10(7) for low gate leakage current, attributing to the Atop-cappingoxygen-rich thin film. Then, a high field-effect mobility of similar to 27.9cm(2)/V.s and a low sub-threshold swing of 0.079 V/decade are achieved by the good interface quality. This structure with both-sideoxygen-rich active layer exhibits its potential application for the future high-resolution and large-size display manufacture.
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