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Toughness evaluation of hard coatings and thin films

期刊

THIN SOLID FILMS
卷 520, 期 7, 页码 2375-2389

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.09.036

关键词

Thin films; Coatings; Fracture toughness

资金

  1. Ministry of Education, Singapore [T208A1218]
  2. National Natural Science Foundation, China [51001084]

向作者/读者索取更多资源

Enormous progress has been achieved over the past decade in evaluating the toughness of hard coatings and thin films. This paper reviews methodologies developed based on indentation, bending, and microtensile testing. In addition, we discuss a recent development in fracture toughness measurement which involves the application of macrotension to a substrate in order to induce microtension in a patterned thin film. (C) 2011 Elsevier B.V. All rights reserved.

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