期刊
THIN SOLID FILMS
卷 520, 期 19, 页码 6031-6049出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2012.06.003
关键词
Sputtering; Sputter emission; Sputter erosion
类别
资金
- Danish Natural Science Research Council (FNU)
The paper is an attempt to trace milestones in the understanding of sputtering by ion bombardment. The field developed rapidly between 1955 and the end of the 1980s, but several important aspects are still under active investigation today. The focus here is on the evolution of the present understanding of the process of sputter emission. The presentation is based primarily on physical arguments, supported by results from theory referred to in the text. Many research groups have contributed to this field. Doing justice to them all appears close to impossible within the given frame. (C) 2012 Elsevier B. V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据