期刊
THIN SOLID FILMS
卷 520, 期 16, 页码 5372-5377出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2012.04.025
关键词
Zinc oxide; Copper; Multilayer; Oxygen gas; Optical properties; Electrical properties; X-ray diffraction; Sputtering
类别
资金
- Chinese Civil Aviation Authority
- National Natural Science Foundation of China [61179055]
- Ministry of Education of China [20100061110006]
- Ministry of Science and Technology of Jilin Province [20090515]
A series of ZnO/Cu/ZnO multilayer films has been fabricated from zinc and copper metallic targets by simultaneous RF and DC magnetron sputtering. Numerical simulation of the optical properties of the multilayer films has been carried out in order to guide the experimental work. The influences of the ZnO and Cu layer thicknesses, and of O-2/Ar ratio on the photoelectric and structural properties of the films were investigated. The optical and electrical properties of the multilayers were studied by optical spectrometry and four point probe measurements, respectively. The structural properties were investigated using X-ray diffraction. The performance of the multilayers as transparent conducting coatings was compared using a figure of merit. In experiments, the thickness of the ZnO layers was varied between 4 and 70 nm and those of Cu were between Sand 37 nm. The O-2/Ar ratios range from 1:5 to 2:1. Low sheet resistance and high transmittance were obtained when the film was prepared using an O-2/Ar ratio of 1:4 and a thickness of ZnO (60 nm)/Cu (15 nm)/ZnO (60 nm). (C) 2012 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据