期刊
THIN SOLID FILMS
卷 520, 期 19, 页码 6295-6298出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2012.06.035
关键词
Cubic pyrochlore films; Bi1.5MgNb1.5O7 thin films; Tunability; Dielectric dispersion; Sputter deposition; Low loss tangent
类别
资金
- National Natural Science Foundation of China [50972024]
The Bi1.5MgNb1.5O7 (BMN) thin films were prepared on platinum coated sapphire by rf magnetron sputter deposition. Effects of substrate temperature, sputter pressure and O-2/(O-2 + Ar) mixing ratio on phase structures and dielectric properties of thin films were investigated. The results indicated that sufficiently high substrate temperature and low sputter pressure would facilitate the formation of cubic pyrochlore in BMN thin films. Meanwhile, the appropriate O-2/(O-2 + Ar) mixing ratio of sputter atmosphere was required. The deposited Bi1.5MgNb1.5O7 cubic pyrochlore thin films with (222) oriented texture exhibited large tunability of similar to 50% at a maximum applied bias field of 1.5 MV/cm, with low dielectric loss of similar to 0.007. The temperature and frequency dependent dielectric measurements indicated that no noticeable dielectric dispersion was detected in BMN cubic pyrochlore thin films. (C) 2012 Elsevier B. V. All rights reserved.
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