期刊
THIN SOLID FILMS
卷 519, 期 19, 页码 6447-6452出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.04.229
关键词
Graphene; Chemical vapor deposition; Raman spectroscopy; Atomic force microscopy; Templating
类别
资金
- Grants-in-Aid for Scientific Research [22016008] Funding Source: KAKEN
We demonstrate a synthesis of graphene layers on graphene templates prepared by the mechanical exfoliation of graphite crystals using a developed chemical vapor deposition (CVD) apparatus that has a furnace with three temperature zones and can regulate the temperatures separately in each zone. This results in individual control over the decomposition reaction of the carbon feedstock and the growth of graphene layers by activated carbon species. CVD growth using multi-temperature zones provides wider temperature windows appropriate to grow graphene layers. We observed that graphene layers proceed by a layer-by-layer growth mode using an optical microscopy, an atomic force microscopy, and Raman spectroscopy. This result suggests that a graphene growth technique using the CVD apparatus is a potential approach for making graphene sheets with precise control of the layer numbers. (C) 2011 Elsevier B.V. All rights reserved.
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