4.4 Article

Forming wrinkled stiff films on polymeric substrates at room temperature for stretchable interconnects applications

期刊

THIN SOLID FILMS
卷 519, 期 2, 页码 818-822

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.08.106

关键词

Stretchable electronics; Wrinkle; Polydimethylsiloxane; Thins films

资金

  1. NSF [CMMI-0700440]

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Periodically wrinkled stiff thin films on elastomeric substrates have been found extensive applications such as in stretchable electronics This paper presents a cost-effective and simple method to form wrinkled stiff SiOx thin films on polydimethylsiloxane (PDMS) substrates at room temperature by ultraviolet/ozone (UV/O) radiation on pre-strained PDMS Systemic studies have been conducted to understand the dependence of the wavy profile on the PDMS pre-strain UV/O exposure time and PDMS modulus The mechanics analysis has been verified to be quantitatively or qualitatively accurate by experimental comparisons The wrinkled SiOx/PDMS system is stretchable and provides a wavy mold for stretchable electrodes The constant electrical resistance during mechanical stretching shows the stretchability of this system (c) 2010 Elsevier B V All rights reserved

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