Preparation of Magneli phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition

Magneli phases of Ti27O52 and Ti6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)(2) (O-i-Pr)(2) as a precursor. Ti6O11 film was obtained at a laser power (P-L) of 200 W and a deposition temperature (T-dep) of 1270 K. Ti27O52 film was obtained at P-L = 150 to 200 W and T-dep = 1120 to 1250 K. Ti6O11 and Ti27O52 films had a faceted texture about 2 mu m in grain size and a columnar cross section. The deposition rate of Ti27O52 and Ti6O11 films were 90 and 70 mu m h(-1), respectively. (C) 2010 Elsevier B.V. All rights reserved.