期刊
THIN SOLID FILMS
卷 518, 期 10, 页码 2801-2807出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.08.034
关键词
Ruthenium cerium dioxides; electrical properties; thin films; composite thin films; electron microscopy; electrical percolation
类别
资金
- Provence-Alpes-Cote d'Azur Regional Council
- General Council of Var
- agglomeration community of Toulon Provence Mediterranean
RuO2-CeO2 composite thin films are deposited on various Si substrates by a radiofrequency magnetron sputtering technique. Compacted polycrystalline pellets of the nanostructured CeO2-RuO2 composite system are used as standard samples for comparative electrical analyses. All films and composite samples are analyzed by X-ray diffraction and transmission electron microscopy. Electrical measurements of radiofrequency sputtering of thin films are performed as a function of the RuO2 fraction and of the temperature (between 25 and 400 degrees C). A nonlinear variation in the electrical conductivity of the RuO2-CeO2 composite thin films as a function of the RuO2 volume fraction (phi) is observed and discussed. It is interpreted in terms of a power law (in (phi - phi c)(m)), where m and phi c are parameters characteristic of the distribution of the conducting phase in a composite medium. (C) 2009 Elsevier B.V. All rights reserved.
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