期刊
THIN SOLID FILMS
卷 518, 期 18, 页码 5104-5109出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.03.017
关键词
Solid solution carbide; Nanocomposite; Sputtering; Gas sensor; Annealing; Transmission electron microscopy; X-ray photoelectron spectroscopy; X-ray diffraction
类别
资金
- Swedish Research Council
- Vinnova (Swedish Governmental Agency for Innovation Systems) through the VINN Excellence Centre FunMat.
Thin films in the Ti-Pt-C system were deposited by non-reactive, DC-magnetron sputtering. Samples were characterised using X-ray photoelectron spectroscopy, X-ray diffraction, and transmission electron microscopy. A previously not reported metastable solid solution carbide, (Ti1-xPtx)C-y with a Pt/Ti ratio of up to 0.43 was observed. This solid solution phase was present both as single phase in polycrystalline samples, and together with amorphous carbon (a-C) in nanocomposite samples. Annealing of nanocomposite samples leads to the decomposition of the solid solution phase and the formation of a nc-TiCx/a-C/nc-Pt nanocomposite. Test sensors for automotive gas exhausts manufactured from such a three-phase material suffer from complete oxidation of the coating at 400 degrees C with no observed sensor activity. (c) 2010 Elsevier B.V. All rights reserved.
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