期刊
THIN SOLID FILMS
卷 519, 期 4, 页码 1452-1457出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.08.019
关键词
Epoxy novolak resin; Spin-coated films; Electric field; Pattern formation; Optical properties; Waveguide
类别
资金
- GA CR [102/09/P104]
- Ministry of Education of the CR [6046137302, LC06041]
- GAAS CR [KAN400480701, A400500505]
Micro-sized patterns were created on oligomer (Su-8) films by the effect of external electric field, perpendicular to the film surface. Structures with varying parameters were prepared and the growth of continuous or dot-like structures was observed. The mechanism dominating the structure growth was examined and found to be a function of experimental conditions. The dependence of the form and the size of the created patterns on the intensity of the electric field, exposure time and initial distance between mask and polymer surface was investigated. Waveguiding properties of the linear pattern, produced by the above technique, were examined and the following parameters were obtained: propagation loss -2-3 dB/cm, effective refractive index - 1.6276, number of supported modes - 30). (C) 2010 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据