期刊
THIN SOLID FILMS
卷 518, 期 15, 页码 4345-4350出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.01.033
关键词
Diffusion; Residual stress; Microcantilever; Sensors; Finite difference methods
类别
资金
- National Natural Science Foundations of China [10672058]
- Program for New Century Excellent Talents in University [NCET-06-0414]
- Shanghai Leading academic discipline project [B503]
The influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors has been analyzed under the framework of thermodynamic theory and Fick's second law. A self-consistent diffusion equation involving the coupling effects of residual stress and diffusion-induced stress is developed. Effects of thickness ratio, modulus ratio, diffusivity ratio and residual stress gradient of film and substrate on the curvature of bilayered cantilever are then discussed with the help of finite difference method. Results reveal that the curvature of bilayered cantilever increases with decreasing the diffusivity ratio and modulus ratio of substrate to film at a given time. Case study of the polysilicon/palladium hydrogen sensor has been finally carried out using the above developed bending theory. (C) 2010 Elsevier B.V. All rights reserved.
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