期刊
THIN SOLID FILMS
卷 517, 期 22, 页码 6192-6197出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.04.007
关键词
Gas sensor; Ag; BaTiO3-CuO; CO2; IAQ
A full study of the BaTiO3-CuO thin-film technology properties as carbon dioxide sensing material is presented. The coatings are deposited by RF-Sputtering and the CO2 concentration is monitored by impedance measurements. Theoretical foundations are correlated to the experimental results and the principal fabrication and operation parameters are clarified: working temperature and frequency, thickness influence and the introduction of silver as an additive. The BaTiO3-CuO layer shows higher sensitivity than the actual low-cost commercial CO2 sensors in the range of the principal applications. (C) 2009 Elsevier B.V. All rights reserved.
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