期刊
THIN SOLID FILMS
卷 517, 期 17, 页码 5010-5013出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.03.033
关键词
DLC; Tungsten; Double layer; X-ray photoelectron spectroscopy; Transmission electron microscope
A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 mu m in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer. (c) 2009 Elsevier B.V. All rights reserved.
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