期刊
THIN SOLID FILMS
卷 517, 期 17, 页码 5110-5115出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.03.193
关键词
Thin film; Surface roughness; Fast Fourier transform
The measurement of surface roughness of optical thin films based on fast Fourier transform (FIT) associated with a Gaussian filter was presented. The measurement of the surface roughness is performed by a Fizeau-type microscopic interferometer combined with the Matlab program to analyse the captured interferograms. The surface profile can be obtained by the fringe pattern analysis program using FFT method. In order to improve the accuracy, we normalize the fringe pattern to eliminate the background variation before using the WE The roughness profile is filtered by the Gaussian filter after the phase change is converted to surface height distribution. The root-mean-square value of surface roughness of optical thin films was determined by our proposed method. The results were verified by atomic force microscopy (AFM). (c) 2009 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据