期刊
THIN SOLID FILMS
卷 517, 期 24, 页码 6502-6507出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.03.213
关键词
Diamond-like carbon (DLC); Linear ion beam source; Mechanical properties; Raman spectroscopy
类别
资金
- Austrian Federal Ministry of Traffic, Innovation and Technology
- Austrian Industrial Research Promotion Fund (FFG)
- Government of Styria
- Forschung Austria
- European Union
An anode layer source is a special ion gun, which can be fed with carbon precursors like acetylene to deposit hard and highly defect-free hydrogenated diamond-like carbon films at room temperature. The present study focuses on the influence of the process parameters - discharge voltage, process pressure and acetylene flow on structure and mechanical properties of the deposited films. Raman spectra show that an increased discharge voltage yields decreased structural disorder, i.e. a lower C-C sp(3) hybridised fraction of carbon atoms in the films. By an elevation of the discharge voltage from 1 to 3 kV the full width at half maximum of the G-band decreases from 194 +/- 0.2 cm(-1) to 183 +/- 0.7 cm(-1). Films deposited at the lowest discharge voltage show in accordance to the spectroscopic data the highest nanohardness (36 +/- 1 GPa), stress (-2.34 +/- 0.2 GPa) and reduced elastic modulus (180 +/- 4 GPa). (C) 2009 Elsevier B.V. All rights reserved.
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