期刊
THIN SOLID FILMS
卷 517, 期 15, 页码 4455-4460出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.01.084
关键词
Organosilicon; Thin films; Plasma deposition; Humidity; Sensor; Fourier transform infrared spectroscopy
类别
资金
- Algerian-French cooperation CMEP [04MDU613]
The response of resistive-type sensors based on thin hexamethyldisiloxane layers to relative humidity (RH) was evaluated. Humidity sensitive layers were plasma polymerized at low frequency glow discharge using a capacitively coupled parallel plate reactor. The sensor design comprises the absorbing layer deposited on clean glass substrate with comb-shape aluminum electrodes (interdigitated structure). The change in electrical impedance of the sensing film was monitored as the device was exposed to humidity. The variation of the plasma-polymerization parameters resulted in different humidity sensing properties which could be correlated to the results of Fourier transform infrared spectroscopy (FTIR). The deposited films exhibited a detectable response to RH ranging from 30 to 95% with low hysteresis, good reproducibility and stability in long-term use. Films with a greater thickness showed a significant decrease in the humidity sensing capability. FTIR analysis revealed the presence of SiH bonding groups, which are frequently linked to the film density. The increase in the plasma discharge power induced also a significant decrease in the diffusion process of water vapor inside the sensitive layer bulk. (C) 2009 Elsevier B.V. All rights reserved.
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