Characterisation of nanolayered aluminium/palladium thin films using nanoindentation

Structure, hardness, and elastic modulus of nanolayered aluminium/palladium thin films, with individual layer thickness varying from 1 nm to 40 nm, were investigated using transmission electron microscopy (TEM) and nanoindentation. TEM micrographs indicated a sharp but not flat Al-Pd interface. With just 6.5% (v/v) Pd a hardness enhancement of similar to 200% was observed for nanolayered Al/Pd compared to the hardness of pure Al film. A maximum hardness enhancement of up to 350% was observed for nanolayered Al/Pd samples compared to the hardness of pure Al film when bilayer thickness was 2 nm and I'd was 50% (v/v). Modulus enhancement was also observed for the nanolayered thin films. (C) 2009 Elsevier B.V. All rights reserved.