期刊
THIN SOLID FILMS
卷 517, 期 13, 页码 3698-3703出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.01.174
关键词
Nanoindentation; Al/Pd multilayer; Hardness; Elastic modulus; Transmission electron microscopy
类别
资金
- Australian Research Council (ARC) Centre of Excellence for Design in Light Metals
Structure, hardness, and elastic modulus of nanolayered aluminium/palladium thin films, with individual layer thickness varying from 1 nm to 40 nm, were investigated using transmission electron microscopy (TEM) and nanoindentation. TEM micrographs indicated a sharp but not flat Al-Pd interface. With just 6.5% (v/v) Pd a hardness enhancement of similar to 200% was observed for nanolayered Al/Pd compared to the hardness of pure Al film. A maximum hardness enhancement of up to 350% was observed for nanolayered Al/Pd samples compared to the hardness of pure Al film when bilayer thickness was 2 nm and I'd was 50% (v/v). Modulus enhancement was also observed for the nanolayered thin films. (C) 2009 Elsevier B.V. All rights reserved.
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