期刊
THIN SOLID FILMS
卷 516, 期 16, 页码 5223-5226出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.07.095
关键词
transparent oxide; room temperature deposition; bandgap; metal dopping; flexible substrate
We grew 2 wt.% Al-doped ZnO (AZO) films on 5.08 cm-diameter polymer substrates at room temperature by the pulsed laser deposition (PLD) technique added the beam-rastering function. The structural properties, surface morphology, resistivity, mobility and chemical bonding states of AZO/polymer films were measured. The structuring of polymer surface by atmospheric plasma can occur at nm scales and can influence adhesion, optical and wettability properties of the materials. With increasing plasma treatment power, surface hydrophilicity and roughness for PET and PES polymer increased, respectively. (C) 2008 Elsevier B.V. All rights reserved.
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