期刊
THIN SOLID FILMS
卷 516, 期 17, 页码 5754-5757出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.10.036
关键词
transparent conductive oxide; Nb-doped TiO2; TNO; anatase; sputtering; polycrystalline films; post-annealing
Transparent conductive oxide (TCO) films of polycrystalline Nb-doped TiO2 (TNO) were fabricated by post-annealing reactively sputtered amorphous films under H-2 atmosphere. Carrier transport properties of the H-2-annealed films were found to be strongly dependent on substrate temperature T-s and oxygen content in sputtering atmosphere. A minimum resistivity (rho) of 9.5 x 10(-4) Omega cm and an average visible transmittance of similar to 75% were obtained at T-s = RT and oxygen content of 10%. This rho value is of the same order as those of epitaxial TNO films, indicating that polycrystalline TNO has sufficient potential as a practical TCO suitable for large-area applications. (C) 2007 Elsevier B.V. All rights reserved.
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