期刊
THIN SOLID FILMS
卷 517, 期 2, 页码 948-951出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2008.07.016
关键词
Silicon nanoporous pillar array (Si-NPA); Capacitive humidity sensor; Sensitivity; Response/recovery time; Humidity hysteresis
类别
资金
- National Natural Science Foundation of China (NSFC) [10574112]
A capacitive humidity sensor with coplanar interdigital electrodes was fabricated based on silicon nanoporous pillar array (Si-NPA). By applying an electrical signal of 1 kHz frequency, a capacitance increment over 1190% was obtained with the relative humidity changing from 11.3% to 94.6%. The response and recovery times were determined to be similar to 11 s and 2 s, respectively, and the humidity hysteresis observed was small. These performances were attributed to the unique structure and morphology of Si-NPA, i.e., the nanoporous and regularly arrayed silicon pillars not only enlarged the sensing area, but also provided an effective channels for vapor transport. (C) 2008 Published by Elsevier B.V.
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