4.4 Article Proceedings Paper

Preparation of carbon microcoils by catalytic methane hot-wire CVD process

期刊

THIN SOLID FILMS
卷 516, 期 5, 页码 714-717

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.06.051

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carbon microcoil; methane; hot-wire CVD; preparation; morphology; SEM

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Three-dimensional (3D) double-helix carbon microcoils (CMCs) were synthesized by the catalytic pyrolysis of methane using Ni catalyst in various hot-wire CVD processes. The most effective process is: using preheating method, in which methane was preheated at 1500 degrees C in a upper reaction tube by a hot wire, and chemical vapor deposition of carbon then occurred at 700-750 degrees C in a lower reaction tube, where CMCs were synthesized. The growth morphologies and microstructure were examined and compared with the conventional CMCs grown by acetylene catalytic pyrolysis. (c) 2007 Elsevier B.V. All rights reserved.

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