期刊
THIN SOLID FILMS
卷 516, 期 5, 页码 558-563出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.06.093
关键词
metal-organic catalytic CVD; organic-inorganic hybrid materials; plasma-assisted Cat-CVD
Organic catalytic CVD (O-Cat-CVD) is an extension of the conventional Cat-CVD technique to organic substances. O-Cat-CVD utilizes metal-organic (MO) compounds as CVD sources and provides various types of organic-inorganic hybrid materials at low substrate temperature below 200 degrees C. This paper introduces the research and development (R/D) to industrialize the O-Cat-CVD and related technologies in Material Design Factory (MDF) Co., Ltd. which is the first university-based venture business company of Osaka City University. Especially, this paper describes the development of a plasma-assisted catalytic CVD apparatus and the application to the growth of various types of organic-inorganic hybrid materials on plastic film substrates at low temperature. (C) 2007 Elsevier B.V. All rights reserved.
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