期刊
TECHNICAL PHYSICS
卷 54, 期 7, 页码 1052-1057出版社
PLEIADES PUBLISHING INC
DOI: 10.1134/S1063784209070214
关键词
-
资金
- National Academy of Sciences of Ukraine, [93/07H]
The results of comprehensive experimental investigation into the plasma-dynamic and optical characteristics of a magnetron cylindrical gas discharge are reported. Experiments are carried out under computer monitoring of the spectrum radiated by the discharge plasma in the visual range. Optimal conditions for TiN binary compound synthesis are found. They are provided by maintaining the intensities of the reactant and plasma-forming gas spectral lines. Characterization of synthesized films is given.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据